✦ LIBER ✦
Powder-free plasma chemical vapor deposition of hydrogenated amorphous silicon with high rf power density using modulated rf discharge
✍ Scribed by Watanabe, Y.; Shiratani, M.; Makino, H.
- Book ID
- 126197584
- Publisher
- American Institute of Physics
- Year
- 1990
- Tongue
- English
- Weight
- 450 KB
- Volume
- 57
- Category
- Article
- ISSN
- 0003-6951
- DOI
- 10.1063/1.104087
No coin nor oath required. For personal study only.