Potential structures in asymmetrical radio frequency discharges containing negative ions

✍ Scribed by Yoshihiro Okuno; Yasunori Ohtsu; Hiroharu Fujita

• Book ID: 103785675
• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 230 KB
• Volume: 193
• Category: Article
• ISSN: 0375-9601
• DOI: 10.1016/0375-9601(94)00607-5