Potential of BPN as a new negative photoresist for a very thick layer with high aspect ratio

✍ Scribed by Bourrier, David; Ghannam, A.; Dilhan, M.; Granier, H.

• Book ID: 121570627
• Publisher: Springer-Verlag
• Year: 2014
• Tongue: English
• Weight: 589 KB
• Volume: 20
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-014-2071-5