Potential of air gap technology by selective ozone/TEOS deposition: Effects of air gap geometry on the dielectric constant

✍ Scribed by A. Stich; Z. Gabric; W. Pamler

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 356 KB
• Volume: 82
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2005.07.017