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Possible reaction of atomic nitrogen with SFx (X = 1–5 and CFx (X = 1–3) fragments from N2SF6 and N2CF4 discharges

✍ Scribed by S.V.K. Kumar; N. Sathyamurthy; S. Manogaran; S.K. Mitra

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 525 KB
Volume: 222
Category: Article
ISSN: 0009-2614
DOI: 10.1016/0009-2614(94)00373-4

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