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Possible Gas-Phase Reactions of H 2 /CH 4 /Tetramethylsilane in Diamond/β-SiC Nanocomposite Film Deposition: An Ab-Initio Study

✍ Scribed by Zhao, Y. L.; Zhang, R. Q.; Srikanth, Vadali. V. S. S.; Jiang, X.

No coin nor oath required. For personal study only.

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