✦ LIBER ✦
Positive- and Negative-Tone CVD Polyacrylic Electron-Beam Resists Developable by Supercritical CO2
✍ Scribed by Y. Mao; N. M. Felix; P. T. Nguyen; C. K. Ober; K. K. Gleason
- Publisher
- John Wiley and Sons
- Year
- 2006
- Tongue
- English
- Weight
- 222 KB
- Volume
- 12
- Category
- Article
- ISSN
- 0948-1907
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