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Position-sensitive focal plane detectors for electron (ESCA) spectrometers

✍ Scribed by L. Asplund; U. Gelius; P.A. Tove; S.Å. Eriksson; N. Bingefors


Book ID
107920984
Publisher
Elsevier Science
Year
1984
Tongue
English
Weight
377 KB
Volume
226
Category
Article
ISSN
0168-9002

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At the INFN Legnaro Laboratories (Padova, Italy), an ion electron emission microscope dedicated to the study of radiation-induced damage in microelectronic devices has been recently installed. It is used to recognize, with micrometric resolution, the impact point of every single ion into the target.