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Position sensing of a grating mark by heterodyne detection using a Zeeman laser

✍ Scribed by Kataoka, Keiji ;Katagiri, Soichi ;Kurosaki, Toshiei


Book ID
115341452
Publisher
The Optical Society
Year
1991
Tongue
English
Weight
598 KB
Volume
30
Category
Article
ISSN
1559-128X

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