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Position Sensing Grating Interferometer for a Specular Object

✍ Scribed by Masayuki Mino

Book ID: 106256164
Publisher: Optical Society of Japan
Year: 1998
Tongue: English
Weight: 746 KB
Volume: 5
Category: Article
ISSN: 1340-6000
DOI: 10.1007/s10043-998-0191-9

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