Pore formation in silicon by wet etching using micrometre-sized metal particles as catalysts

✍ Scribed by Lee, Chia-Lung; Tsujino, Kazuya; Kanda, Yuji; Ikeda, Shigeru; Matsumura, Michio

• Book ID: 118210265
• Publisher: Royal Society of Chemistry
• Year: 2008
• Tongue: English
• Weight: 223 KB
• Volume: 18
• Category: Article
• ISSN: 0959-9428
• DOI: 10.1039/b715639a