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Polysilicon surface-modification technique to reduce sticking of microstructures

✍ Scribed by Youngjoo Yee; Kukjin Chun; Jong Duk Lee; Chang-Jin Kim

Book ID
103959842
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
805 KB
Volume
52
Category
Article
ISSN
0924-4247

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