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Polysilicon strain-gauge transducers

โœ Scribed by V.A. Gridchin; V.M. Lubimskyi; M.P. Sarina


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
350 KB
Volume
30
Category
Article
ISSN
0924-4247

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A silicon subminiature microphone based
โœ R. Schellin; G. Hess ๐Ÿ“‚ Article ๐Ÿ“… 1992 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 403 KB

A silicon subminiature microphone, based on the piezoresistive effect in polysilicon using only one chip, is proposed. The acoustic sensor is fabricated by a technique that is compatible with a slightly modified CMOS process also using a standard micromechanical fabrication technology. The main prod