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Polynomial solution for two thicknesses of a multilayer system from a single ellipsometric measurement

โœ Scribed by Russev, Stoyan C.; Mircheva, Iliana; Drolet, Jean-Pierre; Ducharme, Daniel; Leblanc, Roger M.


Book ID
115387766
Publisher
Optical Society of America
Year
1996
Tongue
English
Weight
420 KB
Volume
13
Category
Article
ISSN
1084-7529

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