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Polymers in microlithography: Materials and processes. ACS Symposium Series 412, Edited by E. Reichmanis, S. A. MacDonald and T. Iwayanagi, American Chemical Society, Washington, 1989. pp. xii + 449, price $94.95. ISBN 0-8412-1701-7

✍ Scribed by A. S. Dunn

Book ID: 104528122
Publisher: John Wiley and Sons
Year: 1991
Tongue: English
Weight: 263 KB
Volume: 24
Category: Article
ISSN: 0959-8103
DOI: 10.1002/pi.4990240412

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