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Polymers from Hexafluoropropylene Oxide (HFPO)

โœ Scribed by Hill, James T.


Book ID
118153583
Publisher
Informa UK (Taylor & Francis)
Year
1974
Tongue
English
Weight
721 KB
Volume
8
Category
Article
ISSN
0022-233X

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Films deposited using pulsed plasma-enhanced chemical vapor deposition (PECVD) from hexafluoropropylene oxide (HFPO) were investigated by X-ray photoelectron spectroscopy (XPS). As compared to continuous rf PECVD, pulsed excitation increases the CF 2 fraction in the film. Film composition was determ