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Polymerized monomolecular layers: A new class of ultrathin resins for microlithography

✍ Scribed by André Barraud; Charles Rosilio; Annie Ruaudel-Teixier

Book ID
107862744
Publisher
Elsevier Science
Year
1980
Tongue
English
Weight
446 KB
Volume
68
Category
Article
ISSN
0040-6090

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