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Polymerization of para-xylylene derivatives (parylene polymerization). I. Deposition kinetics for parylene N and parylene C

✍ Scribed by Kramer, P. ;Sharma, A. K. ;Hennecke, E. E. ;Yasuda, H.

Book ID: 105335128
Publisher: John Wiley and Sons
Year: 1984
Weight: 804 KB
Volume: 22
Category: Article
ISSN: 0360-6376
DOI: 10.1002/pol.1984.170220218

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