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Polymer Masks on Semiconductors: A Novel Way to Nanostructures

✍ Scribed by M. Haupt; S. Miller; K. Bitzer; K. Thonke; R. Sauer; J.P. Spatz; S. Mössmer; C. Hartmann; M. Möller

Publisher: John Wiley and Sons
Year: 2001
Tongue: English
Weight: 92 KB
Volume: 224
Category: Article
ISSN: 0370-1972
DOI: 10.1002/(sici)1521-3951(200104)224:3<867::aid-pssb867>3.0.co;2-q

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