✦ LIBER ✦
Polymer degradation in reactive ion etching and its possible application to all dry processes
✍ Scribed by H. Hiraoka; L.W. Welsh Jr.
- Publisher
- Elsevier Science
- Year
- 1981
- Weight
- 224 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0146-5724
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