✦ LIBER ✦
Polyimide sacrificial layer for SOI SG-MOSFET pressure sensor
✍ Scribed by M. Fernández-Bolaños; N. Abelé; V. Pott; D. Bouvet; G-A. Racine; J.M. Quero; A.M. Ionescu
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 366 KB
- Volume
- 83
- Category
- Article
- ISSN
- 0167-9317
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