Polyimide passivated semitransparent In0.49Ga0.51P/GasAs MSM photodetector operating at 840 nm wavelength
✍ Scribed by M. A. Matin; J. G. Simmons
- Publisher
- John Wiley and Sons
- Year
- 1999
- Tongue
- English
- Weight
- 132 KB
- Volume
- 22
- Category
- Article
- ISSN
- 0895-2477
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✦ Synopsis
A polyimide passi¨ated semitransparent metal᎐semicon-( ) ductor᎐metal photodetector MSM᎐PD with an In Ga PrGaAs 0 .49 0 .51 layer structure has been fabricated and characterized. For a 50 m = 50m de¨ice with 2 m finger width and 2 m finger spacing, we obtained a dark current density of 7.44 Arcm 2 for a passi¨ated and 11.2 Arcm 2 for an unpassi¨ated de¨ice at 10 V bias. The front illumination responsi¨ity at 0.84 m wa¨elength is 0.54᎐0.74 ArW at 10 V bias for both passi¨ated and unpassi¨ated de¨ices. The dark current and responsi¨ity of a passi¨ated photodetector are nearly independent of the bias ¨oltage as compared with those of an unpassi¨ated photodetector.