✦ LIBER ✦
Polyimide-based X-ray masks with advanced performance of pattern accuracy and thermal stability
✍ Scribed by Seichin Kinuta; Yoshiaki Saita; Masashi Kobayashi; Martin Boerner; Volker Saile; Sumio Hosaka
- Book ID
- 106185958
- Publisher
- Springer-Verlag
- Year
- 2010
- Tongue
- English
- Weight
- 428 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0946-7076
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