Polyhedral oligomeric silsesquioxane (POSS) acrylate copolymers for microfabrication: properties and formulation of resist materials

✍ Scribed by E. Tegou; V. Bellas; E. Gogolides; P. Argitis

• Book ID: 113797599
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 228 KB
• Volume: 73-74
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2004.02.047