Poly(ethylene terephthalate) crystallization as a method for microlithography

✍ Scribed by M. F. Sonnenschein; A. M. Kotliar; C. M. Roland

• Book ID: 104522773
• Publisher: Society for Plastic Engineers
• Year: 1990
• Tongue: English
• Weight: 635 KB
• Volume: 30
• Category: Article
• ISSN: 0032-3888
• DOI: 10.1002/pen.760301809

✦ Synopsis

Abstract

Thermal lithography on poly(ethylene terephthalate) (PET) is carried out by inducing crystallization through selective exposure of amorphous films to Infrared radiation. The obtained images can be smaller than the wavelength of the CO2 laser light. This circumvention of the diffraction limit is accomplished by taking advantage of the non‐linear temperature dependence of the crystallization rate. The optical marking process is reversible through simple melting of the crystalline images. The complementary process, selective melting of an initially crystalline film, can also be accomplished. The use as a heat sink of a mask which forms the image pattern is demonstrated.