Polydiagnostic calibration performed on a low pressure surface wave sustained argon plasma

✍ Scribed by de Vries, N; Palomares, J M; Iordanova, E I; van Veldhuizen, E M; van der Mullen, J J A M

• Book ID: 115503625
• Publisher: Institute of Physics
• Year: 2008
• Tongue: English
• Weight: 424 KB
• Volume: 41
• Category: Article
• ISSN: 0022-3727
• DOI: 10.1088/0022-3727/41/20/205203