Polydentate Amines as CVD Precursor Ancillary Ligands. Epitaxial MgO Thin-Film Growth Using a Highly Volatile, Thermally and Air-Stable Magnesium Precursor

✍ Scribed by J. R. Babcock; D. D. Benson; A. Wang; N. L. Edleman; J. A. Belot; M. V. Metz; T. J. Marks

• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 319 KB
• Volume: 6
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/1521-3862(200008)6:4<180::aid-cvde180>3.0.co;2-5