✦ LIBER ✦
Polycrystalline silicon thin film transistors fabricated at reduced thermal budgets by utilizing fluorinated gate oxidation
✍ Scribed by Kouvatsos, D.N.; Hatalis, M.K.
- Book ID
- 114536573
- Publisher
- IEEE
- Year
- 1996
- Tongue
- English
- Weight
- 691 KB
- Volume
- 43
- Category
- Article
- ISSN
- 0018-9383
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