✦ LIBER ✦
Polycrystalline silicon carbide as a substrate material for reducing adhesion in MEMS
✍ Scribed by D. Gao; C. Carraro; R.T. Howe; R. Maboudian
- Book ID
- 106550952
- Publisher
- Springer US
- Year
- 2006
- Tongue
- English
- Weight
- 343 KB
- Volume
- 21
- Category
- Article
- ISSN
- 1023-8883
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