✦ LIBER ✦
Poly(4-methylstyrene-co-chloromethylstyrene): A negative electron beam resist—synthesis and lithography evaluation
✍ Scribed by Stanley Affrossman; Massoud Bakshaee; David Bramley; Fong Chow; Christopher Dix; Paul Hendy; Mervyn Jones; Anthony Ledwith; Margaret Mills; Phillip Miller Tate; Richard A. Pethrick
- Publisher
- John Wiley and Sons
- Year
- 1992
- Tongue
- English
- Weight
- 833 KB
- Volume
- 28
- Category
- Article
- ISSN
- 0959-8103
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