✦ LIBER ✦
Point exposure distribution measurements for proximity correction in electron beam lithography on a sub-100 nm scale
✍ Scribed by Rishton, S. A.
- Book ID
- 121292060
- Publisher
- AVS (American Vacuum Society)
- Year
- 1987
- Tongue
- English
- Weight
- 882 KB
- Volume
- 5
- Category
- Article
- ISSN
- 0734-211X
- DOI
- 10.1116/1.583847
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