Platinum silicides formation on heavily doped silicon by ion mixing

✍ Scribed by S.V. Vasiljev; N.N. Gerasimenko; V.V. Kalinin; V.S. Kulikauskas

• Book ID: 114168143
• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 864 KB
• Volume: 19-20
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(87)80150-7