✦ LIBER ✦
Platinum-silicide formation during rapid thermal annealing: Dependence on substrate orientation and pre-implanted impurities
✍ Scribed by P. I. Gaiduk; A. Nylandsted Larsen
- Book ID
- 104721987
- Publisher
- Springer
- Year
- 1991
- Tongue
- English
- Weight
- 315 KB
- Volume
- 53
- Category
- Article
- ISSN
- 1432-0630
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