Plastic deformation in 200 mm silicon wafers arising from mechanical loads in vertical-type and horizontal-type furnaces

✍ Scribed by A. Fischer; G. Kissinger; G. Ritter; V. Akhmetov; M. Kittler

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 478 KB
• Volume: 159-160
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/j.mseb.2009.02.008