Plasmonic nano lithography with a high scan speed contact probe

✍ Scribed by Kim, Yongwoo; Kim, Seok; Jung, Howon; Lee, Eungman; Hahn, Jae W.

• Book ID: 115412062
• Publisher: Optical Society of America
• Year: 2009
• Tongue: English
• Weight: 241 KB
• Volume: 17
• Category: Article
• ISSN: 1094-4087
• DOI: 10.1364/OE.17.019476