✦ LIBER ✦
Plasmachemische Gasphasenabscheidung – eine Technologie zur Deposition organischer und anorganischer Schichten. Plasma Enhanced Chemical Vapor Deposition – a Thin Film Technique for Organic and Inorganic Layers
✍ Scribed by K. Schade; F. Stahr; O. Steinke; U. Stephan
- Book ID
- 111702060
- Publisher
- John Wiley and Sons
- Year
- 2005
- Tongue
- English
- Weight
- 270 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0947-076X
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