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Plasmachemical synthesis of aluminum-based nitride compounds in vacuum-arc discharge plasma

✍ Scribed by Yu. A. Bystrov, N. Z. Vetrov, A. A. Lisenkov

Book ID: 119884904
Publisher: SP MAIK Nauka/Interperiodica
Year: 2012
Tongue: English
Weight: 523 KB
Volume: 38
Category: Article
ISSN: 1063-7850
DOI: 10.1134/s1063785012100173

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