✦ LIBER ✦
Plasma-Radiation-Induced Interface States in Metal-Nitride-Oxide-Silicon Structure of Charge-Coupled Device Image Sensor and Their Reduction Using Pulse-Time-Modulated Plasma
✍ Scribed by Okigawa, Mitsuru; Ishikawa, Yasushi; Samukawa, Seiji
- Book ID
- 111900598
- Publisher
- Institute of Pure and Applied Physics
- Year
- 2003
- Tongue
- English
- Weight
- 302 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0021-4922
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