✦ LIBER ✦
Plasma properties in a large-volume, cylindrical and asymmetric radio-frequency capacitively coupled industrial-prototype reactor
✍ Scribed by Lazović, Saša; Puač, Nevena; Spasić, Kosta; Malović, Gordana; Cvelbar, Uroš; Mozetič, Miran; Radetić, Maja; Petrović, Zoran Lj
- Book ID
- 120563354
- Publisher
- Institute of Physics
- Year
- 2013
- Tongue
- English
- Weight
- 228 KB
- Volume
- 46
- Category
- Article
- ISSN
- 0022-3727
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