Plasma production with DC discharge planar magnetron device for thin film preparation

✍ Scribed by Fujita, H; Yagura, S; Ueno, H; Nagano, M

• Book ID: 115315696
• Publisher: Institute of Physics
• Year: 1986
• Tongue: English
• Weight: 548 KB
• Volume: 19
• Category: Article
• ISSN: 0022-3727
• DOI: 10.1088/0022-3727/19/9/014