Plasma polymer membranes from hexafluoro
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F. Huber; J. Springer; M. Muhler
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Article
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1997
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John Wiley and Sons
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English
โ 271 KB
๐ 2 views
Thin plasma polymer layers were produced employing feed mixtures of hexafluoroethane and hydrogen in an rf parallel-plate reactor. The layers are intended for use in membrane-based separation of oxygen and nitrogen. The hexafluoroethaneto-hydrogen mixture ratio was varied over a wide range, whereas