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Plasma polymerized hexamethyldisiloxane: discharge and film studies

✍ Scribed by SF Durrant; RP Mota; MA Bica de Moraes


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
802 KB
Volume
47
Category
Article
ISSN
0042-207X

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Plasma-polymerized hexamethyldisiloxane
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Nanometer-size holes in plasma-polymerized thin films were characterized by variable-energy positron lifetime spectroscopy for the first time. Hexamethyldisiloxane (HMDSiO) was plasma-polymerized at different discharge powers (30 -105 W) and monomer pressures (1.0 -4.9 Pa). The positron lifetime spe

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The humidity sorptive powers of polymer coatings deposited on quartz resonators has been studied. The polymer was obtained from hexamethyldisiloxane by plasma polymerization under different operating conditions of glow discharge current density, gas phase pressure, polymer film thickness and modific