Plasma parameters of an oxygen microwave discharge obtained by probe diagnostics: II. Radial distributions

✍ Scribed by Kiss'ovski, Zh; Brockhaus, A; Korzec, D; Kytzia, S; Engemann, J

• Book ID: 119941722
• Publisher: Institute of Physics
• Year: 2007
• Tongue: English
• Weight: 475 KB
• Volume: 16
• Category: Article
• ISSN: 0963-0252
• DOI: 10.1088/0963-0252/16/3/011