Deposition of Silicon Carbide and Nitrid
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ZoltΓ‘n KΓ‘roly; CecΓlia Bartha; Ilona Mohai; Csaba BalΓ‘zsi; IstvΓ‘n E. SajΓ³; JΓ‘nos
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Article
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2012
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John Wiley and Sons
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English
β 285 KB