Plasma Ionization in Low-Pressure Radio-Frequency Discharges. Part I: Optical Measurements

✍ Scribed by O'Connell, Deborah; Gans, Timo; Meige, Albert; Awakowicz, Peter; Boswell, Rod W.

• Book ID: 118180671
• Publisher: IEEE
• Year: 2008
• Tongue: English
• Weight: 140 KB
• Volume: 36
• Category: Article
• ISSN: 0093-3813
• DOI: 10.1109/tps.2008.927348