✦ LIBER ✦
Plasma investigations by a langmuir probe for characterizing laser assisted PVD processes inside a scanning electron microscope
✍ Scribed by Rossek, U. ;Wetzig, K. ;Menzel, S.
- Publisher
- John Wiley and Sons
- Year
- 1994
- Tongue
- English
- Weight
- 514 KB
- Volume
- 146
- Category
- Article
- ISSN
- 0031-8965
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