Plasma immersion ion implantation experiments with long and short rise time pulses using high voltage hard tube pulser

✍ Scribed by J.O Rossi; M Ueda; J.J Barroso

• Book ID: 108422817
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 133 KB
• Volume: 136
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/s0257-8972(00)01008-2