Plasma-grown oxides on silicon with extremely low interface state densities : G. P. Kennedy, S. Taylor, W. Eccleston and M. J. Uren. Microelectronics Journal, 25, 485 (1994)

• Book ID: 103287315
• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 111 KB
• Volume: 36
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(96)81997-4