✦ LIBER ✦
Plasma etching of silicon for semiconductor device fabrication : A Belka,British Telecom Research Laboratories, Martlesham Heath, Ipswich IP5 7RE, UK
- Book ID
- 103468343
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 157 KB
- Volume
- 34
- Category
- Article
- ISSN
- 0042-207X
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