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Plasma Etching of Poly(dimethylsiloxane): Roughness Formation, Mechanism, Control, and Application in the Fabrication of Microfluidic Structures

✍ Scribed by Vlachopoulou, Maria-Elena; Kokkoris, George; Cardinaud, Christophe; Gogolides, Evangelos; Tserepi, Angeliki


Book ID
118766139
Publisher
John Wiley and Sons
Year
2012
Tongue
English
Weight
800 KB
Volume
10
Category
Article
ISSN
1612-8850

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